Abstract: This paper aims at proposing a design of MEMS bell plates manufactured in silicon technology on silicon on insulator (SOI) wafers. The etching process and the release of the structure are ...
Subscribe Login Register Log out My Profile Subscriber Services Search PGe NEWSLETTERS PG STORE ARCHIVES OBITUARIES JOBS PUBLIC NOTICES CLASSIFIEDS EVENTS PETS ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results