The oxygen radicals produced in the plasma generate CO, CO 2, and H 2 O by reacting with carbon compounds, and these generated byproducts are eliminated from the instrument. As per quantum chemistry ...

GLOBALFOUNDRIES is taking a big step towards greener chipmaking with a breakthrough initiative at its Singapore site. Its 200 mm fab Remote Plasma Clean project replaces traditional chamber-cleaning ...

DENVER--(BUSINESS WIRE)--Advanced Energy (Nasdaq: AEIS) – a global leader in highly engineered, precision power conversion, measurement, and control solutions – today announced the launch of its new ...

Process tool components and subsystems supplier Advanced Energy Industries Inc. today unveiled its latest inductive plasma source, the Litmas RPS 1501 linear-inductive remote plasma source for ...